1.

Conference Proceedings
Conference Proceedings
1. TiSi2 THIN FILMS FORMED ON CRYSTALLINE AND AMORPHOUS SILICON
Xiao, Z. G. ; Jiang, H. ; Honeycutt, J. ; Osburn, C. M. ; McGuire, G. ; Rozgonyi, G. A.
Pub. info.: Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A..  pp.167-172,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 181
2.

Conference Proceedings
Conference Proceedings
2. PREPARATION AND CHARACTERIZATION OF LPCVD TiB2 THIN FILMS
Choi, Chang ; Ruggles, G. A. ; Osburn, C. M. ; Shea, P. ; Xing, G. C.
Pub. info.: Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A..  pp.455-462,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 181
3.

Conference Proceedings
Conference Proceedings
3. Evaluation of 2.0nm Grown and Deposited Dielectrics in 0.1ｦﾌm PMOSFETs
Srivastava, A. ; Heinisch, H. H. ; Vogel, E. ; Parker, C. ; Osburn, C. M. ; Masnari, N. A. ; Wortman, J. J. ; Hauser, J. R.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.163-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
4.

Conference Proceedings
Conference Proceedings
4. Evaluation and Comparison of 3.0nm Gate-Stack Dielectrics for Tenth-Micron Technology NMOSFETs
Yee, K. F. ; Osburn, C. M. ; Masnari, N. A. ; Hauser, J. R. ; Parker, C. G. ; Lucovsky, G. ; Henson, W. K. ; Wortman, J. J. ; Kippenberg, T. ; Kuerschner, S.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.157-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
5.

Conference Proceedings
Conference Proceedings
5. Sub-Half Micron Elevated Source/Drain NMOSFETS by Low Temperature Selective Epitaxial Deposition
Sun, J. ; Bartholomew, R. F. ; Bellur, K. ; O'Neil, P. A. ; Srivastava, A. ; Violette, K. E. ; Ozturk, M. C. ; Osburn, C. M. ; Masnari, N. A.
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.343-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429
6.

Conference Proceedings
Conference Proceedings
6. Fabrication of organic nanoparticles by PRINT: master generation using lithographic and RIE techniques [6151-115]
Pandya, A.A ; Maynor, B. W. ; Gratton, S. E. A. ; Vellenga, D. G. ; Yu, D. G. ; Osburn, C. M. ; DeSimone, J. M.
Pub. info.: Emerging Lithographic Technologies X.  pp.61513C-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151