1.

Conference Proceedings
Conference Proceedings
1. Study of Metal/Barrier/Low-K Interfaces for Interlayer Dielectric Applications
Chang, J.P. ; Case, C.B. ; Krautter, H.W. ; Sapjeta, J. ; Opila, R.L. ; Decker, M.A.
Pub. info.: Interconnect and contact metallization for ULSI : proceedings of the international symposium.  pp.261-269,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-31
2.

Conference Proceedings
Conference Proceedings
2. CHARACTERIZATION OF Ti-EPOXY INTERFACES
Opila, R.L. ; MaSaitis, R.L. ; Ibidunni, A.O. ; Davenport, A.J. ; Isaacs, H.S. ; Taylor, J.A.
Pub. info.: Proceedings of the Second International Symposium on Corrosion and Reliability of Electronic Materials and Devices.  pp.86-98,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-1
3.

Conference Proceedings
Conference Proceedings
3. THE EFFECT OF DILUTE CLEANING AND RINSING CHEMISTRIES ON TRANSITION METAL REMOVAL AND Si SURFACE MICROROUGHNESS
Chang, J.P. ; Sapjeta, J. ; Rosamilia, J.M. ; Boone, T. ; Eng, J., Jr. ; Opila, R.L. ; Brennan, S. ; Wiemer, C. ; Pianetta, P.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.17-24,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
4.

Conference Proceedings
Conference Proceedings
4. CHARACTERIZATION AND RELIABILITY OF ELECTROLYTIC CAPACITORS EXPOSED TO HALOGENATED SOLVENTS
Opila, R.L. ; MaSaitis, R.L. ; Muller, A.J. ; Psota-Kelty, L.A. ; Daoud, S.
Pub. info.: Proceedings of the Second International Symposium on Corrosion and Reliability of Electronic Materials and Devices.  pp.207-220,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-1
5.

Conference Proceedings
Conference Proceedings
5. OXIDATIVE STABILITY OF TERPENES, ALTERNATIVES TO CHLOROFLUOROCARBONS FOR CLEANING ELECTRONICS
Muller, A.J. ; Opila, R.L. ; Krautter, H.W. ; Chandross, E.A.
Pub. info.: Proceedings of the Second International Symposium on Corrosion and Reliability of Electronic Materials and Devices.  pp.193-206,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-1
6.

Conference Proceedings
Conference Proceedings
6. ULTRAVIOLET LIGHT STIMULATED HALOGEN CHEMISTRY ON CLEANING SILICON SURFACES
Chang, J.P. ; Eng, J., Jr. ; Sapjeta, J. ; Opila, R.L. ; Cox, P. ; Pianetta, P.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.129-136,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
7.

Conference Proceedings
Conference Proceedings
7. High Performance, Highly Reliable Gate Oxide Formed with Rapid Thermal Oxidation In-Situ Steam Generation (ISSG) Technique
Ma, Y. ; Chen, Y.N. ; Brown, M.M ; Li, F. ; Chen, Y. ; Eng, J., Jr. ; Opila, R.L. ; Chabal, Y.J. ; Sapjeta, J. ; Muller, D.A. ; Xing, G.C. ; Trowbridge, T. ; Khau, M. ; Tam, N.
Pub. info.: Rapid thermal and other short-time processing technologies : proceedings of the international symposium.  pp.179-186,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-9
8.

Conference Proceedings
Conference Proceedings
8. X-Ray Photoelectron Studies of Oxynitrides for Gate Applications
Chang, J.P. ; Green, M.L. ; Opila, R.L. ; Eng, J.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium.  pp.193-206,  1999.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-6
9.

Conference Proceedings
Conference Proceedings
9. CORROSION OF ALUMINUM INTERCONNECT PASSIVATED WITH POLYIMIDE OR SILICON NITRIDE
Comizzoli, R.B. ; Opila, R.L. ; Wong, Y.H.
Pub. info.: Electronic packaging materials science IV : symposium held April 24-28, 1989, San Diego, California, U.S.A..  pp.277-282,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 154
10.

Conference Proceedings
Conference Proceedings
10. 43 Investigation of Nitrided Hafnium Silicates for High-K Dielectrics Using Photoelectron Spectroscopy
Mathew, A. ; Demirkan, K. ; Opila, R.L. ; Wang, C.-G. ; Maes, J. W. ; Wilk, G.
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium.  pp.360-365,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-05