1.

Conference Proceedings
Conference Proceedings
1. Oxygen Precipitation Behavior and its Optimum Condition for Internal Gettenng and Mechanical Strength in Epitaxial and Polished Silicon Wafers *
Sueoka, K. ; Akatsuka, M. ; Onno, T. ; Asayama, E. ; Koike, Y. ; Adachi, N. ; Sadamitsu, S. ; Katahama, H.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.164-179,  2000.  Bellingham, Wash..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-17
2.

Conference Proceedings
Conference Proceedings
2. Defects Behavior on p/p+ Epitaxial Wafers During Low Temperature Device Processing
Hourai, M. ; Asayama, E. ; Onno, T. ; Sano, M. ; Tsuya, H.
Pub. info.: Proceedings of the Fourth International Symposium on High Purity Silicon.  pp.214-225,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-13