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12 results

Conference Proceedings

1. INTERACTION AMONG CONTAMINANT METALS IN WET CLEANING PROCESSES

Hayami, Y. ; Okui, Y. ; Ogawa, H. ; Fujimura, S.

Pub. info.:	Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.97-104, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-35

Conference Proceedings

2. CLEANING OF SiO2 BULK LAYERS WITH SUCCESSIVE PROCESSING OF POLY-Si CVD AND UV/Cl2

Sugino, R. ; Tada, Y. ; Ito, T. ; Okui, Y. ; Sakuma, J.

Pub. info.:	Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.328-335, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-35

Conference Proceedings

3. Fe REMOVAL EFFECTS OF SILICON CHLORIDES (SiCl R) DURING UV/Cl2 DRY CLEANING

Sugino, R. ; Okui, Y. ; Shigeno, M. ; Ohkubo, S. ; Takasaki, K. ; Ito, T.

Pub. info.:	Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.291-298, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-35

Conference Proceedings

4. Influence of Metal Contamination on Minority Carrier Diffusion Length and Oxide Charge

Sakuma, J. ; Okui, Y. ; Miyazawa, H. ; Inoue, F. ; Miyajima, M.

Pub. info.:	Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.245-, 1998. Warrendale, Pa. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	510

Conference Proceedings

5. Channel Epitaxy of 3C-SiC on Si Substrates by CVD

Nishino, S. ; Okui, Y. ; Jacob, C. ; Ohshima, S.

Pub. info.:	Silicon carbide 2002 -- materials, processing and devices : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.. pp.15-22, 2003. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	742

Conference Proceedings

6. Microfabrication of Si Column Covered with SiC Film for Electron Emitter

Nakata, T. ; Ohshiro, Y. ; Shoji, A. ; Okui, Y. ; Ohshima, S. ; Hayashi, Y. ; Nishino, S.

Pub. info.:	Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy. pp.237-240, 2005. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	483-485

Conference Proceedings

7. Selective Epitaxial Growth of Pyramidal 3C-SiC on Patterned Si Substrate

Okui, Y. ; Jacob, C. ; Ohshima, S. ; Nishino, S.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.331-334, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

Conference Proceedings

8. Homoepitaxial Growth of Cubic Silicon Carbide by Sublimation Epitaxy

Furusho, T. ; Miyanagi, T. ; Okui, Y. ; Ohshima, S. ; Nishino, S.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.279-282, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

Conference Proceedings

9. Homoepitaxial Growth of Cubic Silicon Carbide by Sublimation Epitaxy

Furusho, T. ; Miyanagi, T. ; Okui, Y. ; Ohshima, S. ; Nishino, S.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.279-282, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

10.

Conference Proceedings

10. Selective Epitaxial Growth of Pyramidal 3C-SiC on Patterned Si Substrate

Okui, Y. ; Jacob, C. ; Ohshima, S. ; Nishino, S.

Pub. info.:	Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.331-334, 2002. Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	389-393

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Author: Okui, Y.