1.

Conference Proceedings

Conference Proceedings
Kessel, C. R. ; Boardman, L. D. ; Rhyner, S. J. ; Cobb, J. L. ; Henderson, C. C. ; Rao, V. ; Okoroanyanwu, U.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.214-220,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
2.

Conference Proceedings

Conference Proceedings
D'Amour, J.N. ; Frank, C.W. ; Okoroanyanwu, U.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part Two  pp.936-942,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
3.

Conference Proceedings

Conference Proceedings
Cobb, J.L. ; Dentinger, P.M. ; Hunter, L.L. ; O'Connell, D.J. ; Gallatin, G.M. ; Hinsberg, W.D. ; Houle, F.A. ; Sanchez, M.I. ; Domke, W.-D. ; Wurm, S. ; Okoroanyanwu, U. ; Lee, S.H.
Pub. info.: Emerging Lithographic Technologies VI.  Part One  pp.412-420,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688
4.

Conference Proceedings

Conference Proceedings
Okoroanyanwu, U. ; Kunze, P. ; Al-Shamery, K.H. ; Romero, J. ; Bernard, J.
Pub. info.: Optical Microlithography XV.  Part One  pp.746-764,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
5.

Conference Proceedings

Conference Proceedings
Wells, G. ; Hermans, J. ; Watso, R. ; Kang, Y.-S. ; Morton, R. ; Kocsis, M.K. ; Okoroanyanwu, U. ; De Bisschop, P. ; Stepanenko, N. ; Ronse, K.G.
Pub. info.: Optical Microlithography XVII.  pp.91-98,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
6.

Conference Proceedings

Conference Proceedings
Okoroanyanwu, U. ; Stepanenko, N. ; Vereecke, G. ; Eliat, A. ; Kocsis, M.K. ; Kang, Y.S. ; Jonckheere, R.M. ; Conard, T. ; Ronse, K.G.
Pub. info.: Optical Microlithography XVII.  pp.487-503,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
7.

Conference Proceedings

Conference Proceedings
Okoroanyanwu, U. ; Gronheid, R. ; Coenen, J. ; Hermans, J. ; Ronse, K.G.
Pub. info.: Optical Microlithography XVII.  pp.1695-1707,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
8.

Conference Proceedings

Conference Proceedings
D'Amour, J.N. ; Frank, C.W. ; Okoroanyanwu, U.
Pub. info.: Advances in resist technology and processing XX.  2  pp.996-1007,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
9.

Conference Proceedings

Conference Proceedings
Tittnich, M ; Hartley, J ; Denbeaux, G ; Okoroanyanwu, U. ; Levinson, H ; Petrillo, K. ; Robinson, C. ; Gil, D. ; Corliss, D. ; Back, D ; Brandl, S ; Schwarz, C ; Goodwin, F. ; Wei, Y. ; Martinick, B. ; Housley, R. ; Benson, P. ; Cummings, K
Pub. info.: Emerging Lithographic Technologies X.  pp.615101-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151