Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.963-968, 1992. Pittsburgh, Pa.. Materials Research Society
Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.969-974, 1990. Pittsburgh, Pa.. Materials Research Society
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1047-1049, 1998. Pennington, NJ. Electrochemical Society
Ohsawa, A. ; Hara, A. ; Aoki, M. ; Koizuka, M. ; Fukuda, T.
Pub. info.:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.936-946, 1994. Pennington, NJ. Electrochemical Society