1.

Conference Proceedings

Conference Proceedings
Kagami, H. ; Miyagawa, R. ; Kawata, A. ; Nakashima, D ; Kobayashi, S. ; Kitano, T. ; Takeshita, K. ; Kubota, H. ; Ohmi, T.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.252-259,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754
2.

Conference Proceedings

Conference Proceedings
Verhaverbeke, S. ; Futatsuki, T. ; Messoussi, R. ; Ohmi, T.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.1170-1181,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
3.

Conference Proceedings

Conference Proceedings
Nakamura, K. ; Futatsuki, T. ; Makihara, K. ; Ohmi, T.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.70-77,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
4.

Conference Proceedings

Conference Proceedings
Ohsasa, K. ; Ohmi, T.
Pub. info.: PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China.  pp.2691-2694,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 475-479(4)
5.

Conference Proceedings

Conference Proceedings
Yonekawa, N. ; Yasui, S. ; Kunimoto, F. ; Ohmi, T. ; Kern, F.W.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.94-101,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
6.

Conference Proceedings

Conference Proceedings
Ohmi, T.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.3-14,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
7.

Conference Proceedings

Conference Proceedings
Kitano, M. ; Nagase, M. ; Shirai, Y. ; Ohmi, T.
Pub. info.: Corrosion and corrosion protection : proceedings of the international symposium.  pp.115-121,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-22
8.

Conference Proceedings

Conference Proceedings
Joo, J.-D. ; Kim, J.-S. ; Morita, H. ; Ohmi, T.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.280-288,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
9.

Conference Proceedings

Conference Proceedings
Sekine, K. ; Choi, G.-M. ; Morita, H. ; Ohmi, T.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.211-220,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3
10.

Conference Proceedings

Conference Proceedings
Kim, J.-S. ; Morita, H. ; Joo, J.-D. ; Ohmi, T.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.199-210,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3