1.

Conference Proceedings
Conference Proceedings
1. Characterization of Ta2O5 thin films with small current leakage for high density DRAMS
Kanda, N. ; Furukawa, R. ; Ishibashi, M. ; Kunitomo, M. ; Homma, T. ; Takahashi, M. ; Uemura, T. ; Kanai, M. ; Kubo, M. ; Ogata, K. ; Yoshida, T. ; Yamamoto, H. ; Ohji, Y.
Pub. info.: Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.129-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 592
2.

Conference Proceedings
Conference Proceedings
2. Ultra-High-Speed and Low-Power SOI CMOS Technology with Body-Tied Hybrid Trench Isolation Structure
Hirano, Y. ; Ipposhi, T. ; Thai, D. H. ; Iwamatsu, T. ; Ikeda, T. ; Tsujiuchi, M. ; Maegawa, S. ; Inuishi, M. ; Ohji, Y.
Pub. info.: Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium.  pp.60-64,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-04