1.

Conference Proceedings
Conference Proceedings
1. Fair scheduling algorithms for supporting QoS in optical burst switching networks
Long, K. ; Tucker, R.S. ; Oh, S.-Y.
Pub. info.: Optical switching and optical interconnection II : APOC 2002 : Asia-Pacific Optical and Wireless Communications : 16-18 October, 2002, Shanghai, China.  pp.158-165,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4907
2.

Conference Proceedings
Conference Proceedings
2. Comparative study of chromeless and attenuated phase shift mask for 0.3-k1 ArF lithography of DRAM
Eom, T.-S. ; Lim, C.-M. ; Kim, S.-M. ; Kim, H.-B. ; Oh, S.-Y. ; Ma, W.-K. ; Moon, S.-C. ; Shin, K.S.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1310-1320,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
3.

Conference Proceedings
Conference Proceedings
3. Double-exposure strategy using OPC and simulation and the performance on wafer with sub-0.10-μm design rule in ArF lithography
Oh, S.-Y. ; Kim, W.-H. ; Yune, H.-S. ; Kim, H.-B. ; Kim, S.-M. ; Ahn, C.-N. ; Shin, K.-S.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1537-1543,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
4.

Conference Proceedings
Conference Proceedings
4. Double exposure to reduce overall line-width variation of 80-nm DRAM gate
Ma, W.-K. ; Lim, C.-M. ; Oh, S.-Y. ; Nam, B.-H. ; Moon, S.-C. ; Shin, K.S.
Pub. info.: Optical Microlithography XVII.  pp.939-946,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377