1.

Conference Proceedings
Conference Proceedings
1. Degradation and recovery of alpha ray irradiated MOSFETs on SIMOX
Ohyama, H. ; Simoen, E. ; Claeys, C. ; Takami, Y. ; Kawamura, K. ; Hakata, T. ; Sunaga, H. ; Ogita, Y.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.289-294,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
2.

Conference Proceedings
Conference Proceedings
2. Microwave Separation Measurements of Bulk Lifetime and Surface Recombination Velocities in Si Wafers with Various Surface Properties
Ogita, Y. ; Minegishi, M. ; Higuma, H. ; Shigeto, M. ; Yakushiji, K.
Pub. info.: Microwave processing of materials V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.79-,  1996.  Pittsburgh,, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 430
3.

Conference Proceedings
Conference Proceedings
3. Microwave Skin Effect in Noncontact Photoconductivity Decay Measurements in Si Wafers
Ogita, Y. ; Takahashi, S.
Pub. info.: Microwave processing of materials V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.93-,  1996.  Pittsburgh,, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 430
4.

Conference Proceedings
Conference Proceedings
4. Noncontact Photoconductivity Amplitude Technique to Characterize Polishing- and Slicing-Induced Residual Damage in Si Wafers
Ogita, Y. ; Nakano, M. ; Masumura, H.
Pub. info.: Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.591-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 378
5.

Conference Proceedings
Conference Proceedings
5. Lifetime Characterization of Polysilicon Back-Sealed Wafers with Bi-Surface Photoconductivity Decay Method
Ogita, Y. ; Uematsu, Y. ; Daio, H.
Pub. info.: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.329-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 477
6.

Conference Proceedings
Conference Proceedings
6. PCA Characterization of Residual Subsurface Damage After Silicon Wafer Mirror Polishing and its Removal
Daio, H. ; Kobayashi, K. ; Ogita, Y.
Pub. info.: Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.261-266,  2000.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 566
7.

Conference Proceedings
Conference Proceedings
7. Mirror-Polishing Residual Damage Characterization in the Subsurface of Si Wafers Using N2 Laser/mm-Wave Photoconductivity Amplitude Technique
Ogita, Y. ; Hosoda, Y. ; Miyazaki, M.
Pub. info.: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.209-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 477