1.

Conference Proceedings
Conference Proceedings
1. Post-Implantation Annealing in a Silane Ambient Using Hot-Wall CVD
Rao, S.P. ; Bergamini, F. ; Nipoti, R. ; Hoff, A.M. ; Oborina, E. ; Saddow, S.E.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.839-842,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
2.

Conference Proceedings
Conference Proceedings
2. DEGRADATION OF OXIDE PROPERTIES CAUSED BY LOW-LEVEL METALLIC CONTAMINATION
Hoff, A. ; Oborina, E. ; Aravamudhan, S. ; Isti, A.
Pub. info.: Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium.  pp.379-385,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-26
3.

Conference Proceedings
Conference Proceedings
3. Fast Non-Contact Dielectric Characterization for SiC MOS Processing
Hoff, A.M. ; Oborina, E.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.1035-1038,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
4.

Conference Proceedings
Conference Proceedings
4. Non-Contact Doping Profiling in Epitaxial SiC
Savtchouk, A. ; Oborina, E. ; Hoff, A.M. ; Lagowski, J.
Pub. info.: Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003.  pp.755-758,  2004.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 457-460
5.

Conference Proceedings
Conference Proceedings
5. Thermal Oxidation of 4H-Silicon Using the Afterglow Method
Hoff, A.M. ; Oborina, E. ; Saddow, S.E. ; Savtchouk, A.
Pub. info.: Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003.  pp.1349-1352,  2004.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 457-460