1.

Conference Proceedings
Conference Proceedings
1. Cleaning of Silicon Surfaces for Nanotechnology
O. Senftleben ; H. Baumgärtner ; I. Eisele
Pub. info.: Rapid thermal processing and beyond : applications in semiconductor processing : special topic volume : selected papers from RTP specialists all over the world, Dornstadt, Germany.  pp.77-118,  2008.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 573-574
2.

Conference Proceedings
Conference Proceedings
2. Loading Effects in the Selective Epitaxial Growth of n-Type Doped SiGe-Structures with LPCVD
M.W. Schindler ; O. Senftleben ; I. Eisele ; W. Taylor
Pub. info.: Solid-State Joint Session (General).  pp.31-34,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(33)
3.

Conference Proceedings
Conference Proceedings
3. Selective Epitaxial Growth of Arsenic-Doped SiGe Structures with LPCVD
M. Schindler ; O. Senftleben ; M. Schmidt ; I. Eisele ; W. Taylor
Pub. info.: Solid-State Posters (General).  pp.33-40,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(30)