1.

Technical Paper

Technical Paper
S. Dattarajan ; O. Park ; E. Fisher ; F. Gouldin ; J. Bozzelli
Pub. info.: AIAA meeting papers on disc.  2009.  Reston, Va..  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 2009
2.

Conference Proceedings

Conference Proceedings
O. Park
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
3.

Conference Proceedings

Conference Proceedings
C. Kallingal ; J. Oberschmidt ; R. Viswanathan ; A. Abdo ; O. Park
Pub. info.: Photomask technology 2008.  1  pp.71221Q-1-71221Q-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7122
4.

Conference Proceedings

Conference Proceedings
H. Kim ; J. Cheng ; C. Rettner ; O. Park ; R. Miller ; M. Hart ; L. Sundstrom ; Y. Zhang
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519