1.
|
Technical Paper
|
S. Dattarajan ; O. Park ; E. Fisher ; F. Gouldin ; J. Bozzelli
Pub. info.: |
AIAA meeting papers on disc. 2009. Reston, Va.. American Institute of Aeronautics and Astronautics |
Title of ser.: |
AIAA Paper : Aerospace Sciences Meeting and Exhibit |
Ser. no.: |
2009 |
|
2.
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Conference Proceedings
|
O. Park
Pub. info.: |
Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6520 |
|
3.
|
Conference Proceedings
|
C. Kallingal ; J. Oberschmidt ; R. Viswanathan ; A. Abdo ; O. Park
Pub. info.: |
Photomask technology 2008. 1 pp.71221Q-1-71221Q-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
7122 |
|
4.
|
Conference Proceedings
|
H. Kim ; J. Cheng ; C. Rettner ; O. Park ; R. Miller ; M. Hart ; L. Sundstrom ; Y. Zhang
Pub. info.: |
Advances in resist materials and processing technology XXIV. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6519 |
|