1.

Conference Proceedings
Conference Proceedings
1. Resist blur and line edge roughness (Invited Paper)
Zhang, G. ; Terry, M. ; O'Brien, S. ; Soper, R. ; Mason, M. ; Kim, W. ; Wang, C. ; Hansen, S. ; Lee, J. ; Ganeshan, J.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.38-52,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Design rule considerations for 65-nm node contact using off axis illumination
Jessen, S. ; Mason, M. ; O'Brien, S. ; Terry, M. ; Soper, R. ; Wolf, T.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.274-284,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
3.

Conference Proceedings
Conference Proceedings
3. VAPOR PHASE HF CLEANING IN CMOS PRODUCTION
O'Brien, S. ; Bohannon, B. ; Hoy Bennett, M. ; Tipton, C. ; Bowling, A.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.233-240,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
4.

Conference Proceedings
Conference Proceedings
4. NOVEL WET ETCHES FOR SALICIDE STRIP PROCESSING
O'Brien, S.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.579-586,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
5.

Conference Proceedings
Conference Proceedings
5. Reliability Analysis of an Inorganic-Organic Hybrid Sol-gel Material System for Waveguiding Applications
O'Brien, S. ; Winfield, R. J. ; Connell, A. ; Crean, G. M.
Pub. info.: Organic/inorganic hybrid materials-2004 : symposium held November 29-December 3, 2004, Boston, Massachusetts, U.S.A..  pp.39-44,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 847
6.

Conference Proceedings
Conference Proceedings
6. UV Assisted Rapid Thermal Processing of Strontium Bismuth Tantalate (SBT) Thin Films
O'Brien, S. ; Hurley, P. K. ; Crean, G. M. ; Johnson, J. ; Caputa, C. ; Wouters, D.
Pub. info.: Materials and processes for nonvolatile memories : symposium held November 30-December 2, 2004, Boston, Massachusetts, U.S.A..  pp.177-182,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 830
7.

Technical Paper
Technical Paper
7. Space Station Facilities for Processing Optical Materials
Workman, G. ; O'Brien, S. ; Gathings, B. ; Kippelen, B. ; Domercq, B.
Pub. info.: A collection of technical papers : Conference and Exhibit on International Space Station Utilization, Cape Canaveral, Florida, 15-18 Octiber 2001.  v. 1  pp.51-60,  2001.  Reston, VA.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Conference and Exhibit on International Space Station Utilization
Ser. no.: 2001
8.

Technical Paper
Technical Paper
8. Low Temperature, Low Energy Carrier (LoTec C) and Phase Change Materials (PCMs) for Biological Samples
Wessling, F. C. ; Stodieck, L. S. ; Hoehn, A. ; Woodard, S. ; O'Brien, S. ; Thomas, S.
Pub. info.: 30th International Conference on Environmental Systems : SAE technical paper.  pp.1-5,  2000.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2000
9.

Conference Proceedings
Conference Proceedings
9. Comparison of the femtosecond time-resolved excited state dynamics in copper oxide and copper sulfide quantum dots (Invited Paper)
Lou, Y. ; Burda, C. ; Yin, M. ; O'Brien, S.
Pub. info.: Physical Chemistry of Interfaces and Nanomaterials III.  pp.30-39,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5513
10.

Conference Proceedings
Conference Proceedings
10. Polymer materials science and processing technologies for planar lightwave circuit manufacture
O'Brien, S. ; Redmond, G. ; Crean, G.M. ; Krueger, J. ; Papen, G.Von
Pub. info.: Photonics Packaging and Integration V.  pp.39-49,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5731