1.

Conference Proceedings
Conference Proceedings
1. PERFECT SILICON SURFACE BY HYDROGEN-ANNEALING
Kubota, H. ; Numano, M. ; Amai, T. ; Miyashita, M. ; Samata, S. ; Matsushita, Y.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.225-236,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
2.

Conference Proceedings
Conference Proceedings
2. Experimental Study of Degradation of Mechanical Strength of Silicon Wafer Caused by LSI processes
Yagishita, A. ; Fujii, O. ; Numano, M. ; Kawamura, N. ; Iwase, M. ; Ushiku, Y. ; Arikado, T.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.441-451,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-12
3.

Conference Proceedings
Conference Proceedings
3. Hydrogen Annealing of Silicon Wafer
Samata, S. ; Numano, M. ; Amai, T. ; Matsushita, Y. ; Kobayashi, K. ; Yamamoto, A. ; Kawaguchi, T. ; Nadahara, S. ; Yamabe, K.
Pub. info.: Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects.  pp.101-110,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-1