Blank Cover Image

ZnO Thin Film Transistors Fabricated by Atomic Layer Deposition Method

Author(s):
Publication title:
Zinc oxide and related materials--2009 : symposium held November 30-December 3, 2009, Boston, Massachusetts, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1201
Pub. Year:
2010
Page(from):
265
Page(to):
270
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605111742 [1605111740]
Language:
English
Call no.:
M23500/1201
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Highly Reliable Passivation Layer for a-InGaZnO Thin-film Transistors Fabricated Using Polysilsesquioxane

Juan Paolo Bermundo, Yasuaki Ishikawa, Haruka Yamazaki, Toshiaki Nonaka, Yukiharu Uraoka

Materials Research Society
7 Conference Proceedings Development of ALD/PECVD Reactor for High Quality LTPS-TFTs Insulator

K. Murata, N. Miyatake, Y. Mori, H. Tachibana, Y. Uraoka

Electrochemical Society
2 Conference Proceedings Electrical and Thermal Stress Analysis of In₂O₃-Ga₂O₃-ZnO Thin-Film Transistors

Mami Fujii, Tomoki Maruyama, Masahiro Horita, Kiyoshi Uchiyama, Ji S. Jung, Jang Y. Kwon, Yukiharu Uraoka

Materials Research Society
8 Conference Proceedings Size Control in ZnO Nanopillar Fabrication Using a Gel-Nanoimprint Process

Ishikawa, Yasuaki, Araki, Shinji, Zhang, Min, Uraoka, Yukiharu

Trans Tech Publications
3 Conference Proceedings Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing and Its Application to Low Temperature poly-Si Thin Film Transistors

Y. Sugawara, Y. Uraoka, H. Yano, T. Hatayama, T. Fuyuki

Electrochemical Society
9 Conference Proceedings Thin Film Batteries with Li3PO4 Solid Electrolyte Fabricated by Pulsed Laser Deposition

N. Kuwata, N. Iwagami, Y. Matsuda, Y. Tanji, J. Kawamura

Electrochemical Society
4 Conference Proceedings Characteristics of ZnO Thin Film by Atomic Layer Deposition for Film Bulk Acoustic Resonator

Kim, S.G., Jung, S.B., Oh, J.H., Kim, H.J., Shin, Y.H.

Trans Tech Publications
10 Conference Proceedings Atomic layer deposition of metal thin films

Leskela, M., Aaltonen, T., Hamalainen, J., Niskanen, A., Ritala, M.

Electrochemical Society
5 Conference Proceedings Effects of Annealing Atmosphere on the Optoelectrical Properties of ZnO Thin Films Grown by Atomic Layer Deposition

Lee, C., Park, Y., Park, A., Kim, C.

Trans Tech Publications
11 Conference Proceedings Atomic Layer Deposition of Thin Films for Microelectronics

Ritala, M., Leskela, M.

Electrochemical Society
6 Conference Proceedings Low Temperature Synthesis of Nanocrystalline Silicon and Silicon Oxide Films by Plasma Chemical Vapor Deposition

Atsushi Tomyo, Hirokazu Kaki, Eiji Takahashi, Tsukasa Hayashi, Kiyoshi Ogata, Yukiharu Uraoka

Materials Research Society
12 Conference Proceedings (342g) Thin Films from Nanocrystals Synthesized in the Gas Phase and Coated By Atomic Layer Deposition: A Case Study of Transparent Conducting ZnO

Elijah Thimsen, Andrew Wagner, Melissa Johnson, K. Andre Mkhoyan, Uwe R. Kortshagen

American Institute of Chemical Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12