1.

Conference Proceedings
Conference Proceedings
1. Advanced surface inspection techniques for SOI wafers
Nozoe,M. ; Sugimoto,A. ; Ikeda,T.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.488-492,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
2.

Conference Proceedings
Conference Proceedings
2. New voltage-contrast imaging method for detection of electrical failures
Nozoe,M. ; Nishiyama,H. ; Shinada,H. ; Tanaka,M.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.599-606,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
3.

Conference Proceedings
Conference Proceedings
3. Open-contact failure detection of via holes by using voltage contrast
Nishiyama,H. ; Nozoe,M. ; Aramaki,K. ; Watanabe,O. ; Ikeda,Y.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.12-21,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344