1.

Conference Proceedings
Conference Proceedings
1. Reduced Clean Time and PFC Emissions Reduction Through Remote Plasma Clean For Lamp Heated CVD Chambers
Mendicino, L. ; Nauert, C. ; Brown, P.T. ; Golovato, S. ; Day, B. ; Atherton, A. ; Nowak, T. ; Silvetti, D. ; Hartz, C. ; Johnson, A. ; Maroulis, P.
Pub. info.: Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries : proceedings of the fourth International Symposium.  pp.15-27,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-6
2.

Technical Paper
Technical Paper
2. A Compact Sled System for Linear Impact, Pole Impact, and Side Impact Testing.
Miller II, P.M. ; Nowak, T. ; Macklem, W.
Pub. info.: 2002 SAE world congress : technical paper.  2002.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2002
3.

Conference Proceedings
Conference Proceedings
3. Evaluation of the Applied Materials Remote Clean TM Technology for Lamp Heated CVD Chambers for Perfluorocompound (PFC) Emissions Reduction
Mendicino, L. ; Nauert, C. ; Flood, J. ; Brown, P.T. ; Atherton, A. ; Nowak, T. ; Silvetti, D.
Pub. info.: Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium.  pp.42-51,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-7