Ghannam, Moustafa Y. ; Dutton, Robert W. ; Novak, Steven W.
Pub. info.:
Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.. pp.283-288, 1987. Pittsburgh, Pa.. Materials Research Society
Magee, Charles W. ; Buyuklimanli, Temel H. ; Marino, John W. ; Novak, Steven W. ; Sahiner, M. Alper
Pub. info.:
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.263-276, 2002. Warrendale, Pa.. Materials Research Society
Yun, Feng ; Reshchikov, Michael A. ; He, Lei ; King, Thomas ; Iqbal, M. Zafar ; Morkoc, Hadis ; Novak, Steven W. ; Wei, Luncun
Pub. info.:
Materials and devices for optoelectronics and microphotonics : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.91-96, 2002. Warrendale, Pa.. Materials Research Society
Sahiner, M.Alper ; Ansari, Parviz ; Carroll, Malcolm S. ; Magee, Charles W. ; Novak, Steven W. ; Woicik, Joseph C.
Pub. info.:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.481-488, 2004. Warrendale, Pa.. Materials Research Society
Magee, Charles W. ; Buyuklimanli, H. ; Marino, John W. ; Novak, Steven W. ; Sahiner, M. Alper
Pub. info.:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.439-450, 2002. Warrendale. Materials Research Society
Sahiner, M. Alper ; Novak, Steven W. ; Woicik, Joe C. ; Takamura, Yayoi ; Griffin, Peter B. ; Plummer, James D.
Pub. info.:
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.121-128, 2002. Warrendale, Pa.. Materials Research Society