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Innovations in molding technologies for microfabrication

Author(s):
Benzler,T. ( Forschungszentrum Karlsruhe GmbH )
Piotter,V.
Hanemann,T.
Mueller,K.
Norajitra,P.
Ruprecht,R.
Hausselt,J.H.
2 more
Publication title:
Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3874
Pub. Year:
1999
Page(from):
53
Page(to):
60
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434715 [081943471X]
Language:
English
Call no.:
P63600/3874
Type:
Conference Proceedings

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