1.

Conference Proceedings
Conference Proceedings
1. Hyper-numerical aperture imaging challenges for 193 nm
Mizoguchi, H. ; Inoue, T. ; Fujimoto, J. ; Yamazaki, T. ; Suzuki, T. ; Matsunaga, T. ; Sakanishi, S. ; Kaminishi, M. ; Watanabe, Y. ; Ohta, T. ; Nakane, M. ; Moriya, M. ; Nakaike, T. ; Shinbori, M. ; Yoshino, M. ; Kawasuji, T. ; Nogawa, H. ; Ito, T. ; Umeda, H. ; Tanaka, S. ; Taniguchi, H. ; Sasaki, Y. ; Kinoshita, J. ; Abe, T. ; Tanaka, H. ; Hayashi, H. ; Miyao, K. ; Niwano, M. ; Kurosu, A. ; Yashiro, M. ; Nagano, H. ; Matsui, N. ; Mimura, T. ; Kakizaki, K. ; Goto, M.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.69-79,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Orientation Dependence of Ductility of Mg Single Crystals at Elevated Temperature
Miura, H. ; Sakai, T. ; Nogawa, H. ; Yang, X. ; Watanabe, Y. ; Miura, S.
Pub. info.: Magnesium-science, technology and applications : proceedings of the International Conference on Magnesium-Science, Technology and Applications September 20-24, 2004, Beijing, China.  pp.193-196,  2005.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 488-489
3.

Conference Proceedings
Conference Proceedings
3. System design of a 157-nm scanner
Nogawa, H. ; Hata, H. ; Kohno, M.
Pub. info.: Optical Microlithography XV.  Part One  pp.602-612,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
4.

Conference Proceedings
Conference Proceedings
4. Development status of a 157-nm full-field scanner
Nakano, H. ; Hata, H. ; Nogawa, H. ; Deguchi, N. ; Kohno, M. ; Chiba, Y.
Pub. info.: Optical Microlithography XVI.  Part Two  pp.763-771,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
5.

Conference Proceedings
Conference Proceedings
5. Development of 157-nm full-field scanners
Hata, H. ; Nogawa, H. ; Suda, S.
Pub. info.: Optical Microlithography XVII.  pp.806-815,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377