1.

Conference Proceedings
Conference Proceedings
1. High-aspect-ratio microstructure fabrication using SU-8 resist
Zhu,J. ; Zhao,X. ; Ni,Z.
Pub. info.: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.86-89,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4174
2.

Conference Proceedings
Conference Proceedings
2. PMMA deep etching by O2RIE
Yu,A. ; Ding,G. ; Guo,X. ; Li,C. ; Mao,H. ; Ni,Z.
Pub. info.: Fourth International Conference on Thin Film Physics and Applications : 8-11 May 2000, Shanghai, China : proceedings.  pp.852-855,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4086