Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.259-265, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Terahertz and gigahertz photonics : 19-23 July 1999, Denver, Colorado. pp.648-659, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Radar sensor technology II : 24 April 1997, Orlando, Florida. pp.165-176, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part1 pp.602-611, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Mobile robots XV and telemanipulator and telepresence technologies VII : 5-6 November 2000, Boston, USA. pp.379-387, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Multimedia networks : security, displays, terminals, and gateways : 4-5 November 1997, Dallas, Texas. pp.49-56, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
7th AIAA/USAF/NASA/ISSMO Symposium on Multidisciplinary Analysis and Optimization : a collection of technical papers, September 2-4, 1998/St. Louis, Missouri. pt. 3 pp.1639-1649, 1998. Reston, VA. American Institute of Aeronautics and Astronautics
Title of ser.:
AIAA Paper : Symposium on Multidisciplinary Analysis and Optimization
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II. pp.174-179, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering