1.

Conference Proceedings
Conference Proceedings
1. Use of Non-Contact Resistivity Measurements for Epitaxy: Surface Charge Profiler Method
Danel, A. ; Tardif, F. ; Kamarinos, G. ; Nguyen, M.C.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.444-455,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13
2.

Conference Proceedings
Conference Proceedings
2. Use of Non-Contact Techniques in Characterization of Silicon Epi Growth Process
Nguyen, M.C. ; Danel, A.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.432-443,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13