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11 results

Conference Proceedings

1. Effect of Material Properties on Stress-Induced Defect Generation in Trench SOI

Nevin, W.A. ; Somasundram, K. ; Blackstone, S. ; Magee, S. ; Paxton, A.T.

Pub. info.:	High Purity Silicon VI : proceedings of the sixth International Symposium. pp.524-531, 2000. Bellingham, Wash.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-17

Conference Proceedings

2. State of the Art Deep Silicon Anisotropic Etching on SOI Bonded Substrates for Dielectric Isolation and MEMS Applications

Gormley, C. ; Yallup, K. ; Nevin, W.A. ; Bhardwaj, J. ; Ashraf, H. ; Huggett, P. ; Blackstone, S.

Pub. info.:	Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.350-361, 1999. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-35

Conference Proceedings

3. Study of Dislocations and Stress in Silicon-On-Insulator Tubs using Transmission Electron Microscopy and Finite Element Modelling

McMullan, A.J. ; O'Mahoney, D. ; Nevin, W.A. ; Paxton, A.T. ; Gregg, J.M.

Pub. info.:	Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.39-48, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-19

Conference Proceedings

4. Oxidation Induced Crystalline Defects in Bonded SOI Wafers

Papakonstantinou, P. ; Somasundram, K. ; Cao, X. ; Quinn, C. ; Yallup, K. ; Nevin, W.A. ; Blackstone, S.

Pub. info.:	Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.178-186, 1999. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-35

Conference Proceedings

5. Photoluminescence Study of Interface Defects in Bonded Silicon Wafers

Nevin, W.A. ; Gay, D.L. ; Blackstone, S. ; Higgs, V.

Pub. info.:	Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.187-194, 1999. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-35

Conference Proceedings

6. LIGHT-INDUCED EFFECTS IN a-Si:H FILMS FABRICATED BY INTENSE LIGHT-FLASH ASSISTED PLASMA CVD, AND ITS APPLICATION TO THE STABILIZATION OF a-Si:H SOLAR CELLS

Nevin, W.A. ; Yamagishi, H. ; Fujihara, T. ; Takenaka, A. ; Yamaguchi, M. ; Tawada, Y.

Pub. info.:	Amorphous silicon technology, 1992. pp.371-376, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	258

Conference Proceedings

7. Characteristics and Applications of Silicon Direct Bonded Interfaces

McCann, P. ; Devine, C. ; Ruddell, F. ; Baine, P. ; Gamble, H.S. ; Nevin, W.A.

Pub. info.:	Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.154-165, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-19

Conference Proceedings

8. Back-end analysis of SOT substrates incorporating metallic layers using a novel non-destructive picosecond ultrasonic technique

Rain, M.F. ; McCusker, N.D. ; McCann, P. ; Nevin, W.A. ; Gamble, H.S.

Pub. info.:	Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.63-68, 2003. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-5

Conference Proceedings

9. Factors Affecting Stress-Induced Defect Generation in Trenched SOI for High-Voltage Applications

Nevin, W.A. ; Somasundram, K. ; McCann, P. ; Cao, X. ; Byrne, S.

Pub. info.:	Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.232-241, 2001. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-27

10.

Conference Proceedings

10. Control of ciystalline defects in trench isolated thick film SOI for high voltage smart power ICs

Cao, X. ; Nicholson, D. ; Nevin, W.A. ; Knopke, J.

Pub. info.:	Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.103-111, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-29

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Author: Nevin, W.A.