1.

Conference Proceedings
Conference Proceedings
1. Platform for collaborative DFM [6156-13]
Poppe, W. J. ; Capodieci, L. ; Neureuther, A.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560E-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
2.

Conference Proceedings
Conference Proceedings
2. From poly line to transistor: building 851M models for non-rectangular transistors [6156-26]
Poppe, W. J. ; Capodieci, L. ; Wu, J. ; Neureuther, A.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560P-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
3.

Conference Proceedings
Conference Proceedings
3. Phase shifting mask as a precision instrument for characterizing image-forming optical systems [5878-08]
Mcintyre, G. ; Robbins, G. ; Neureuther, A.
Pub. info.: Advanced characterization techniques for optics, semiconductors, and nanotechnologies II : 2-4 August, 2005, San Diego, California, USA.  pp.587808-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5878
4.

Conference Proceedings
Conference Proceedings
4. Characterizing edge-generated stray-light sources for TPF Coronagraph pupil masks [5905-19]
Ceperley, D. ; Neureuther, A. ; Lieber, M. ; Kasdin, J.
Pub. info.: Techniques and instrumentation for detection of exoplanets II : 2-4 August 2005, San Diego, California, USA.  pp.59050J-,  2005.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5905
5.

Conference Proceedings
Conference Proceedings
5. Evaluating the end-to-end performance of TPF-C with vector propagation models: Part I. Pupil mask effects [5905-20]
Lieber, M. ; Neureuther, A. ; Ceperley, D. ; Kasdin, J. ; Hoppe, D. J. ; Eisenmann, A.
Pub. info.: Techniques and instrumentation for detection of exoplanets II : 2-4 August 2005, San Diego, California, USA.  pp.59050K-,  2005.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5905
6.

Conference Proceedings
Conference Proceedings
6. Top antireflective coating process for immersion lithography
Yuan, L. ; Nagahara, S. ; Neureuther, A.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.519-526,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
7.

Conference Proceedings
Conference Proceedings
7. Vector scattering analysis of TPF coronagraph pupil masks
Ceperley, D. A. ; Neureuther, A. ; Lieber, M. ; Kasdin, J. ; Shih, T. -M.
Pub. info.: Optical systems degradation, contamination, and stray light: effects, measurements, and control : 2-5 August 2004, Denver, Colorado, USA.  pp.228-239,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5526
8.

Conference Proceedings
Conference Proceedings
8. Experimental verification of PSM polarimetry: monitoring polarization at 193-nrn high-NA with phase-shift masks [6154-13]
Mcintyre, G. ; Neureuther, A. ; Slonaker, S. ; Vellanki, V. ; Reynolds, P.
Pub. info.: Optical Microlithography XIX.  pp.61540D-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
9.

Conference Proceedings
Conference Proceedings
9. The effects of the photomask on multiphase shift test monitors [6349-135]
Mcintyre, G. ; Neureuther, A.
Pub. info.: Photomask Technology 2006.  pp.634912-634912,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
10.

Conference Proceedings
Conference Proceedings
10. Interferometric-probe monitors for self-diagnostics of phase-shifting mask performance
McIntyre, G.R. ; Neureuther, A.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.1324-1330,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256