1.

Conference Proceedings

Conference Proceedings
Neumann, M. J. ; Shin, H. ; Qiu, H. ; Ritz, E. ; DeFrees, R. A. ; Hendricks, M. R. ; Alman, D. A. ; Jurczyk, B. E. ; Ruzic, D. N. ; Bristol, R.
Pub. info.: Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA.  pp.556-562,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5751
2.

Conference Proceedings

Conference Proceedings
Lytle, W. M. ; Neumann, M. J. ; Ruzic, D. N.
Pub. info.: Emerging Lithographic Technologies X.  pp.61511B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151