Neumann, M. J. ; Shin, H. ; Qiu, H. ; Ritz, E. ; DeFrees, R. A. ; Hendricks, M. R. ; Alman, D. A. ; Jurczyk, B. E. ; Ruzic, D. N. ; Bristol, R.
Pub. info.:
Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA. pp.556-562, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering