1.

Conference Proceedings
Conference Proceedings
1. HOMOGENEITY OF WET OXIDATION BY RTP
Gluck, M. ; Konig, U. ; Hersener, J. ; Nenyei, Z. ; Tillmann, A.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.215-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342
2.

Conference Proceedings
Conference Proceedings
2. Pattern Related Non-Uniformities During Rapid Thermal Processing
Bremensdorfer, R. ; Marcus, S. ; Nenyei, Z.
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.327-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429
3.

Conference Proceedings
Conference Proceedings
3. GAS FLOW ENGINEERING IN RAPID THERMAL PROCESSING
Nenyei, Z. ; Sommer, H. ; Gelpey, J. ; Bauer, A.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.401-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342
4.

Conference Proceedings
Conference Proceedings
4. Nitrogen Profile and Electrical Properties of Reoxidized Thermally Grown Silicon Nitride
Ludsteck, A, ; Schulze, J. ; Eisele, I. ; Dietl, W. ; Chung, H. ; Nenyei, Z. ; Bergmaier, A. ; Dollinger, G.
Pub. info.: Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium.  pp.232-241,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-01