1.

Conference Proceedings
Conference Proceedings
1. Modeling of SiO2 Stress Relaxation and Stress Dependent Oxidation
Navi, M. ; Dunham, S.T.
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.417-428,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-4
2.

Conference Proceedings
Conference Proceedings
2. Boron Diffusion in Oxide - Effect of Incorporated Nitrogen and Fluorine
Navi, M. ; Dunham, S.T. ; Kim, B.Y. ; Kwong, D.L.
Pub. info.: Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.386-393,  1997.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-10