1.

Conference Proceedings
Conference Proceedings
1. Non-linear Process Applied to Multiple Correlations in Pattern Recognition of Defocused Images,
Vargas,A. ; Campos,J. ; Navarro,R.
Pub. info.: Optics for science and new technology : 17th Congress of the International Commission for Optics, August 19-23, 1996, Hotel Riviera(Yusong), Taejon Korea.  Part1  pp.519-520,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2778
2.

Conference Proceedings
Conference Proceedings
2. Extended ATHENA alignment performance and application for the 100-nm technology node
Navarro,R. ; Keij,S. ; Boef,A.J.den ; Schets,S. ; Bilsen,F.van ; Simons,G. ; Schuurhuis,R. ; Burghoorn,J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.682-694,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344