1.

Conference Proceedings
Conference Proceedings
1. High-performance absolute optical encoder using M-code
Matsuzoe,Y. ; Nakayama,T. ; Tsuji,N. ; Fujita,K. ; Yoshizawa,T.
Pub. info.: Optomechatronic systems II : 29-31 October 2001, Newton, USA.  pp.280-289,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4564
2.

Conference Proceedings
Conference Proceedings
2. Laser-induced rear ablation of metal thin films
Sano,T. ; Yamada,H. ; Nakayama,T. ; Miyamoto,I.
Pub. info.: Second International Symposium on Laser Precision Microfabrication : 16-18 May 2001, Singapore.  pp.70-73,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4426
3.

Conference Proceedings
Conference Proceedings
3. Prediction Method of Sharpness of {110}<00titl>Secondary Recrystallization Texture of Fe-3%Si Alloy
Yoshitomi,Y. ; Ushigami,Y. ; Takahashi,N. ; Nakayama,T. ; Suga,Y. ; Harase,J.
Pub. info.: Grain growth in polycrystalline materials II : proceedings of the 2nd International Conference on Grain Growth in Polycrystalline Materials, held in Kitakyushu, Japan, 17-20 May, 1995.  pp.629-634,  1996.  Zurich-Uetikon, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 204-206
4.

Conference Proceedings
Conference Proceedings
4. CO2 laser drilling of printed wiring boards and development of in-process monitoring system
Nakayama,T. ; Sano,T. ; Miyamoto,I. ; Tanaka,K. ; Uchida,Y.
Pub. info.: Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA.  pp.379-386,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3933
5.

Conference Proceedings
Conference Proceedings
5. Accurate proximity correction method with total-process proximity-based correction factor(TCF)
Hashimoto,K. ; Usui,S. ; Hasebe,S. ; Murota,M. ; Nakayama,T. ; Matsuoka,F. ; Inoue,S. ; Kobayashi,S. ; Yamamoto,K.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.224-233,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
6.

Conference Proceedings
Conference Proceedings
6. Diffractive near-field array generators
Klaus,W. ; Okazaki,A. ; Suzuki,H. ; Nakayama,T. ; Kodate,K.
Pub. info.: 18th Congress of the International Commission for Optics : Optics for the next millennium : 2-6 August, 1999, San Francisco, California.  pp.564-565,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3749
7.

Conference Proceedings
Conference Proceedings
7. Resist characteristics with direct-write electron beam and SCALPEL exposure system
Sato,M. ; Omori,K. ; Ishikawa,K. ; Nakayama,T. ; Novembre,A.E. ; Ocola,L.E.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.227-236,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
8.

Conference Proceedings
Conference Proceedings
8. Characterization and optimization of a laser-produced x-ray source with a gas puff target
Fiedorowicz,H. ; Bartnik,A. ; Jarocki,R. ; Rakowski,R. ; Szczurek,M. ; Daido,H. ; Sakaya,N. ; Suzuki,M. ; Nagatomo,H. ; Tang,H. ; Choi,I.W. ; Tohayama,Y. ; Yamagami,S. ; Nakayama,T.
Pub. info.: EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado.  pp.10-20,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3767
9.

Conference Proceedings
Conference Proceedings
9. Modeling of Secondary Recrystallization in 3% Silicon Steels
Nakayama,T. ; Ushigami,Y.
Pub. info.: Grain growth in polycrystalline materials : proceedings of the 1st International Conference on Grain Growth in Polycrystalline Materials, held in Rome, Italy, 18-21 June, 1991.  Pt.1  pp.413-418,  1992.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 94-96
10.

Conference Proceedings
Conference Proceedings
10. New bottom antireflection coating approach for KrF lithography at sub-150-nm design rule
Iguchi,E. ; Komano,H. ; Nakayama,T.
Pub. info.: Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA.  Part1  pp.521-530,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3999