1.

Conference Proceedings
Conference Proceedings
1. DEPOSITION OF AMORPHOUS CARBON FILMS BY LASER INDUCED CVD
tachibana, H. ; Nakaue, A. ; Kawate, Y.
Pub. info.: Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA.  pp.367-372,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 101
2.

Conference Proceedings
Conference Proceedings
2. Microwave Introduction to ECR Plasma in Circular- ly Polarized Mode
Kinoshita, T. ; Nozawa, T. ; Nishizuka, T. ; Suzuki, K. ; Nakaue, A.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.86-91,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
3.

Conference Proceedings
Conference Proceedings
3. ECR Plasma Etching of N+ Polysilicon Gate
Nozawa, T. ; Kinoshita, T. ; Nishizuka, T. ; Suzuki, K. ; Nakaue, A.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.134-140,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21