1.

Conference Proceedings
Conference Proceedings
1. Comparison of CD variation between organic and inorganic bottom antireflective coating on topographic substrates
Nakaoka,S. ; Watanabe,H. ; Okuda,Y.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.932-941,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Technical Paper
Technical Paper
2. Wear and Leakage in Seal Ring Design
Nakaoka,S. ; Kameike,M. ; Ono,S. ; Abiko,T. ; Takeda,T.
Pub. info.: SAE 2001 World Congress : technaical paper.  pp.1-7,  2001.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2001