Yamazaki, T. ; Kobayashi, N. ; Takahashii, S. ; Nakanishi, T.
Pub. info.:
Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A.. pp.435-440, 1990. Pittsburgh, Pa.. Materials Research Society
Nakanishi, T. ; Taguchi, M. ; Mitsuhira, N. ; Matsumoto, N. ; Ozaki, S. ; Komachi, K. ; Okumura, N.
Pub. info.:
Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium. pp.13-17, 1999. Pennington, NJ. Electrochemical Society
Nakanishi, T. ; Ozaki, M. ; Nam, H.-S. ; Yokoshima, T. ; Osaka, T.
Pub. info.:
Magnetic Materials, Processes, and Devices VI, Applications to Storage and Microelectromechanical Systems (MEMS) : proceedings of the International Symposium. pp.176-184, 2000. Pennington, N.J.. Electrochemical Society
Magnetic Materials, Processes, and Devices VI, Applications to Storage and Microelectromechanical Systems (MEMS) : proceedings of the International Symposium. pp.167-175, 2000. Pennington, N.J.. Electrochemical Society
Kaseda, M. ; Yamada, M. ; Nakanishi, T. ; Osaka, T.
Pub. info.:
Electrochemical technology applications in electronics : proceedings of the third international symposium. pp.263-272, 1999. Pennington, NJ. Electrochemical Society
Sugizaki, T. ; Tada, Y. ; Hikazutani, K-I. ; Nakanishi, T. ; Takasaki, K.
Pub. info.:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.207-, 1999. Warrendale, PA. MRS - Materials Research Society
Nakanishi, T. ; Ohkubo, S. ; Tamura, Y. ; Sugino, R. ; Awaji, N. ; Takasaki, K.
Pub. info.:
The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface. pp.316-328, 1996. Pennington, NJ. Electrochemical Society
Yokoshima, T. ; Kawashima, A. ; Nakanishi, T. ; Osaka, T. ; Saito, M. ; Ohashi, K.
Pub. info.:
Magnetic materials, processes, and devices VII and electrodeposition of alloys : proceedings of the International Symposium. pp.365-375, 2002. Pennington, N.J.. Electrochemical Society