1.

Conference Proceedings
Conference Proceedings
1. Hyper-numerical aperture imaging challenges for 193 nm
Mizoguchi, H. ; Inoue, T. ; Fujimoto, J. ; Yamazaki, T. ; Suzuki, T. ; Matsunaga, T. ; Sakanishi, S. ; Kaminishi, M. ; Watanabe, Y. ; Ohta, T. ; Nakane, M. ; Moriya, M. ; Nakaike, T. ; Shinbori, M. ; Yoshino, M. ; Kawasuji, T. ; Nogawa, H. ; Ito, T. ; Umeda, H. ; Tanaka, S. ; Taniguchi, H. ; Sasaki, Y. ; Kinoshita, J. ; Abe, T. ; Tanaka, H. ; Hayashi, H. ; Miyao, K. ; Niwano, M. ; Kurosu, A. ; Yashiro, M. ; Nagano, H. ; Matsui, N. ; Mimura, T. ; Kakizaki, K. ; Goto, M.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.69-79,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. GT40A: durable 45-W ArF injection-lock laser light source fordryjimmersion lithography [6154-99]
Tanaka, S. ; Tsushima, H. ; Nakaike, T. ; Yamazaki, T. ; Saito, T. ; Tomaru, H. ; Kakizaki, K. ; Matsunaga, T. ; Suzuki, T. ; Wakabayashi, O. ; Nagai, S. ; Fujimoto, J. ; Inoue, T. ; Mizoguchi, H
Pub. info.: Optical Microlithography XIX.  pp.61542O-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
3.

Conference Proceedings
Conference Proceedings
3. High power injection lock 6kHz 60W laser for ArF dry/wet lithography [6154-78]
Mizoguchi, H. ; Inoue, T. ; Fujimoto, J. ; Suzuki, T. ; Matsunaga, T. ; Sakanish, S. ; Kaminishi, M. ; Watanabe, Y. ; Nakaike, T. ; Shinbori, M. ; Yoshino, M ; Kawasuji, T ; Nogawa, H ; Umeda, H ; Taniguchi, H ; Sasaki, Y ; Kinoshita, J ; Abe T ; Tanaka, H ; Hayashi, H ; Miyao, K ; Niwano, M ; Kurosu, A ; Yashiro, M ; Nagano, H ; Igarashi, T ; Mimura, T ; Kakizaki, K
Pub. info.: Optical Microlithography XIX.  pp.615425-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
4.

Conference Proceedings
Conference Proceedings
4. Spectral metrologies for ultra-line-narrowed F2 laser
Nakaike, T. ; Wakabayashi, O. ; Suzuki, T. ; Mizoguchi, H. ; Nakao, K. ; Nohdomi, R. ; Ariga, T. ; Kitatochi, N. ; Suganuma, T. ; Kumazaki, T. ; Hotta, K. ; Yoshioka, M.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1714-1721,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691