1.

Conference Proceedings
Conference Proceedings
1. Micro-Mapping of Fe Atoms Aggregated on MOS Device Structure
Tomita, H. ; Saito, M. ; Nadahara, S. ; Shiotani, H. ; Muraoka, H.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.422-431,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13
2.

Conference Proceedings
Conference Proceedings
2. Advanced Technology Processing and State-of-the-Art Solutions to Cleaning, Contamination Control, and Integration Problems
Abadeer, W. W. ; LeBlanc, A. ; Kluwe, A. ; Schulz, P. ; Vollertsen, R. ; Penka, V. ; Nadahara, S. ; Antreasyan, A. ; Cote, D. ; Cote, W. ; Levy, M. ; Akatsu, H. ; Ludeke, R.
Pub. info.: Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA.  pp.261-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 386
3.

Conference Proceedings
Conference Proceedings
3. Hydrogen Annealing of Silicon Wafer
Samata, S. ; Numano, M. ; Amai, T. ; Matsushita, Y. ; Kobayashi, K. ; Yamamoto, A. ; Kawaguchi, T. ; Nadahara, S. ; Yamabe, K.
Pub. info.: Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects.  pp.101-110,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-1