1.
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Conference Proceedings
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Wakabayashi,O. ; Sakuma,J. ; Suzuki,T. ; Kubo,H. ; Kitatochi,N. ; Suganuma,T. ; Nakaike,T. ; Kumazaki,T. ; Hotta,K. ; Mizoguchi,H. ; Nakao,K. ; Togashi,T. ; Nabekawa,Y. ; Watanabe,S.
Pub. info.: |
Optical Microlithography XIV. 4346 pp.1066-1073, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4346 |
|
2.
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Conference Proceedings
|
Midorikawa,K. ; Takahashi,E. ; Tamaki,Y. ; Nagata,Y. ; Nabekawa,Y.
Pub. info.: |
Soft X-Ray Lasers and Applications IV. pp.189-194, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4505 |
|