1.

Conference Proceedings

Conference Proceedings
Wakabayashi,O. ; Sakuma,J. ; Suzuki,T. ; Kubo,H. ; Kitatochi,N. ; Suganuma,T. ; Nakaike,T. ; Kumazaki,T. ; Hotta,K. ; Mizoguchi,H. ; Nakao,K. ; Togashi,T. ; Nabekawa,Y. ; Watanabe,S.
Pub. info.: Optical Microlithography XIV.  4346  pp.1066-1073,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
2.

Conference Proceedings

Conference Proceedings
Midorikawa,K. ; Takahashi,E. ; Tamaki,Y. ; Nagata,Y. ; Nabekawa,Y.
Pub. info.: Soft X-Ray Lasers and Applications IV.  pp.189-194,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4505