1.

Conference Proceedings

Conference Proceedings
E. van Setten ; W. de Boeij ; B. Hepp ; N. le Masson ; G. Swinkels ; M. van de Kerkhof
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings

Conference Proceedings
J. Ruoff ; J. T. Neumann ; E. Schmitt-Weaver ; E. van Setten ; N. le Masson
Pub. info.: Photomask technology 2007.  1  pp.67301T-1-67301T-15,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730