1.
Conference Proceedings
Lee, C.J. ; Sakuraba, M. ; Ishii, M. ; Matsuura, T. ; Murota, J. ; Kawashima, I. ; Yabumoto, N.
Pub. info.:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11 . pp.1356-1363, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-25
2.
Conference Proceedings
Tsuchiya, T. ; Matsuura, T. ; Murota, J.
Pub. info.:
ULSI Process Integration : proceedings of the International Symposium . pp.205-210, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-2
3.
Conference Proceedings
Matsuura, T. ; Seino, T. ; Murota, J.
Pub. info.:
Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium . pp.220-225, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-30
4.
Conference Proceedings
Seino, T. ; Fukuchi, A. ; Matsuura, T. ; Murota, J.
Pub. info.:
ULSI Process Integration : proceedings of the International Symposium . pp.324-332, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-2
5.
Conference Proceedings
Ishii, M. ; Goto, K. ; Sakuraba, M. ; Matsuura, T. ; Murota, J. ; Koyanagi, M.
Pub. info.:
ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology . pp.441-452, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-3
6.
Conference Proceedings
Tsuchiya, T. ; Murota, J.
Pub. info.:
ULSI Process Integration : proceedings of the International Symposium . pp.241-252, 2003. Pennington, N.J.. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-6
7.
Conference Proceedings
Honda, Y. ; Matsuura, T. ; Murota, J.
Pub. info.:
Proceedings of the twelfth International Symposium on Plasma Processing . pp.94-100, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-4
8.
Conference Proceedings
Honma, F. ; Murota, J. ; Yoshida, T. ; Goto, K. ; Maeda, T. ; Aizawa, K. ; Sawada, Y.
Pub. info.:
Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition . pp.171-177, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-2
9.
Conference Proceedings
Kanetsuna, T. ; Matsuura, T. ; Murota, J.
Pub. info.:
Plasma processing XIII : proceedings of the international symposium . pp.251-256, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-6
10.
Conference Proceedings
Murota, J. ; Sakuraba, M. ; Matsuura, T.
Pub. info.:
Proceedings of the Third International Symposium on Defects in Silicon . pp.189-202, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-1