1.

Conference Proceedings

Conference Proceedings
Kohler, C. ; de Boeij, W. ; van Ingen-Schenau, K. ; van de Kerkhof, M. ; de Klerk, J. ; Kok, H. ; Swinkels, G. ; Finders, J. ; Mulkens, J. ; Fiolka, D. ; Heil, T.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.13-22,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings

Conference Proceedings
Mulkens, J. ; Streefkerk, B. ; Haagendorp, M.
Pub. info.: Advanced microlithography technologies : 8-10 November, 2004, Beijing, China.  pp.196-207,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5645
3.

Conference Proceedings

Conference Proceedings
Sewell, H. ; Mulkens, J. ; McCafferty, D. ; Markoya, L. ; Streefkerk, B. ; Graeupner, P.
Pub. info.: Optical Microlithography XIX.  pp.615406-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
4.

Conference Proceedings

Conference Proceedings
Jasper, H. ; Modderman, T. ; Van de Kerkhof, M. ; Wagner, C. ; Mulkens, J. ; De. Bodij, W. ; Van Seten, E ; Kneer, B.
Pub. info.: Optical Microlithography XIX.  pp.61541W-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
5.

Conference Proceedings

Conference Proceedings
Mulkens, J. ; Fahey, T.J. ; McClay, J.A. ; Stoeldraijer, J.M. ; Wong, P. ; Brunotte, M. ; Mecking, B.
Pub. info.: Optical Microlithography XV.  Part One  pp.613-625,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
6.

Conference Proceedings

Conference Proceedings
Mulkens, J. ; McClay, J.A. ; Tirri, B.A. ; Brunotte, M. ; Mecking, B. ; Jasper, H.
Pub. info.: Optical Microlithography XVI.  Part Two  pp.753-762,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
7.

Conference Proceedings

Conference Proceedings
Streefkerk, B. ; Baselmans, J. ; Gehoel-van Ansem, W. ; Mulkens, J. ; Hoogendam, C. ; Hoogendorp, M. ; Flagello, D.G. ; Sewell, H. ; Graupner, P.
Pub. info.: Optical Microlithography XVII.  pp.285-305,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
8.

Conference Proceedings

Conference Proceedings
Modderman, T.M. ; Jasper, H. ; Boom, H. ; Uitterdijk, T. ; Dana, S. ; Sewell, H. ; O'Neil, T.K. ; Mulkens, J. ; Brunotte, M. ; Mecking, B. ; Gruner, T.
Pub. info.: Optical Microlithography XVII.  pp.816-826,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
9.

Conference Proceedings

Conference Proceedings
Flagello, D.G. ; Arnold, B. ; Hansen, S. ; Dusa, M. ; Socha, R.J. ; Mulkens, J. ; Garreis, R.
Pub. info.: Optical Microlithography XVII.  pp.21-33,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377