1.
Conference Proceedings
Kohler, C. ; de Boeij, W. ; van Ingen-Schenau, K. ; van de Kerkhof, M. ; de Klerk, J. ; Kok, H. ; Swinkels, G. ; Finders, J. ; Mulkens, J. ; Fiolka, D. ; Heil, T.
Pub. info.:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA . pp.13-22, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
2.
Conference Proceedings
Mulkens, J. ; Streefkerk, B. ; Haagendorp, M.
Pub. info.:
Advanced microlithography technologies : 8-10 November, 2004, Beijing, China . pp.196-207, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5645
3.
Conference Proceedings
Sewell, H. ; Mulkens, J. ; McCafferty, D. ; Markoya, L. ; Streefkerk, B. ; Graeupner, P.
Pub. info.:
Optical Microlithography XIX . pp.615406-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6154
4.
Conference Proceedings
Jasper, H. ; Modderman, T. ; Van de Kerkhof, M. ; Wagner, C. ; Mulkens, J. ; De. Bodij, W. ; Van Seten, E ; Kneer, B.
Pub. info.:
Optical Microlithography XIX . pp.61541W-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6154
5.
Conference Proceedings
Mulkens, J. ; Fahey, T.J. ; McClay, J.A. ; Stoeldraijer, J.M. ; Wong, P. ; Brunotte, M. ; Mecking, B.
Pub. info.:
Optical Microlithography XV . Part One pp.613-625, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4691
6.
Conference Proceedings
Mulkens, J. ; McClay, J.A. ; Tirri, B.A. ; Brunotte, M. ; Mecking, B. ; Jasper, H.
Pub. info.:
Optical Microlithography XVI . Part Two pp.753-762, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040
7.
Conference Proceedings
Streefkerk, B. ; Baselmans, J. ; Gehoel-van Ansem, W. ; Mulkens, J. ; Hoogendam, C. ; Hoogendorp, M. ; Flagello, D.G. ; Sewell, H. ; Graupner, P.
Pub. info.:
Optical Microlithography XVII . pp.285-305, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377
8.
Conference Proceedings
Modderman, T.M. ; Jasper, H. ; Boom, H. ; Uitterdijk, T. ; Dana, S. ; Sewell, H. ; O'Neil, T.K. ; Mulkens, J. ; Brunotte, M. ; Mecking, B. ; Gruner, T.
Pub. info.:
Optical Microlithography XVII . pp.816-826, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377
9.
Conference Proceedings
Flagello, D.G. ; Arnold, B. ; Hansen, S. ; Dusa, M. ; Socha, R.J. ; Mulkens, J. ; Garreis, R.
Pub. info.:
Optical Microlithography XVII . pp.21-33, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377