1.

Conference Proceedings
Conference Proceedings
1. Impact of Rapid Thermal Annealing of Ti-TiN Bilayers on Subsequent Chemical Vapor Deposition of Tungsten
Mouroux, A. ; Palmans, R. ; Keinonen, J. ; Zhang, S.-L. ; Maex, K. ; Petersson, C. S.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.365-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
2.

Conference Proceedings
Conference Proceedings
2. The Formation of C54 TiSi2 in the Presence of Implanted or Deposited Molybdenum
Roux, M. ; Mouroux, A. ; Zhang, S-L.
Pub. info.: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.53-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 564
3.

Conference Proceedings
Conference Proceedings
3. In Situ Curvature and Diffraction Studies of Pd Films on Si(011) During Solid-State Reaction
Gergaud, P. ; Thomas, O. ; Chenevier, B. ; Ghetta, V. ; Mouroux, A. ; Zhang, S.L.
Pub. info.: Polycrystalline metal and magnetic thin films-2000 : symposium held April 25-27, 2000, San Francisco, California, U.S.A..  pp.G8.3-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 615
4.

Conference Proceedings
Conference Proceedings
4. Interdiffusion and Phase Formation During Thermal Annealing of Ti/Mo Bilayers on Si Substrates
Mouroux, A. ; Zhang, S.-L. ; Kaplan, W. ; Nygren, S. ; Ostling, M. ; Petersson, C. S.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.511-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427