1.

Conference Proceedings

Conference Proceedings
Basim, G.B. ; Adler, J.J. ; Mahajan, U. ; Singh, R.K. ; Moudgil, B.M.
Pub. info.: Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium.  pp.369-381,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-37
2.

Conference Proceedings

Conference Proceedings
Basim, G.B. ; Adler, J.J. ; Mahajan, U. ; Singh, R.K. ; Moudgil, B.M.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.45-55,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-26