Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas. pp.84-117, 1996. Bellingham, WA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California. pp.180-189, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining technology for micro-optics : 20 September 2000, Santa Clara, USA. pp.30-55, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Materials and Device Characterization in Micromachining II. pp.192-199, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Microelectronic Structures and MEMS for Optical Processing IV. pp.191-201, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Microelectronic Structures and MEMS for Optical Processing IV. pp.135-143, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Miniaturized Systems with Micro-Optics and Micromechanics III. pp.271-279, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Miniaturized Systems with Micro-Optics and Micromechanics III. pp.66-80, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Microelectronic Structures and MEMS for Optical Processing III. pp.94-101, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering