Walker, D. D. ; Beaucamp, A. T. H. ; Doubrovski, V. ; Dunn, C. ; Freeman, R. ; McCavana, G. ; Morton, R. ; Riley, D. ; Simms, J. ; Wei, X.
Pub. info.:
Optical manufacturing and testing VI : 31 July-1 August 2005, San Diego, California, USA. pp.58690E-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Van Wingerden, J. ; Le Cam, L. ; Wientjes, R. ; Benndorf, M. ; Trouiller, Y. ; Belledent. J. ; Morton, R. ; Aksenov, Y.
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Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.61560O-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Walker, D. D. ; Beaucamp, H. T. A. ; Duobrovski, V. ; Dunn, C. ; Evans, R. ; Freeman, R. ; McCavana, G. ; Morton, R. ; Riley, D. ; Simms, J. ; Yu, G. ; Wei, X.
Pub. info.:
Current developments in lens design and optical engineering VII : 14-15 August 2006, San Diego, California, USA. pp.62880P-, 2006. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Warrick, S. ; Hinnen, P. ; Morton, R. ; Cooper, K. ; Sassoulas, P.-O. ; Depre, J. ; Navarro, R. ; van Haren, R. ; Browning, C. ; Reber, D. ; Megens, H.
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Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.154-163, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Walker, D.D. ; Beaucamp, A.T.H. ; Bingham, R.G. ; Brooks, D. ; Freeman, R. ; Kim, S.-W. ; King, A. ; McCavana, G. ; Morton, R. ; Riley, D. ; Simms, J.
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Optical manufacturing and testing V : 3-5 August 2003, San Diego, California, USA. pp.15-28, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Walker, D. D. ; Beaucamp, A. T. H. ; Doubrovski, V. ; Dunn, C. ; Freeman, R. ; Hobbs, G. ; McCavana, G. ; Morton, R. ; Riley, D. ; Simms, J. ; Wei, X.
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Optical fabrication, testing and metrology II : 13-15 September 2005, Jena, Germany. pp.59650S-, 2005. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Wong, S. P. ; Peng, Qicai ; Cheung, W. Y. ; Guo, W. S. ; Xu, J. B. ; Wilson, I. H. ; Hark, S. K. ; Morton, R. ; Lau, S. S.
Pub. info.:
Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.307-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Adams, Daniel ; Alford, T. L. ; Laursen, T. ; Deng, F. ; Morton, R. ; Lau, S. S.
Pub. info.:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.337-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Zou, Y. L. ; Alford, T. L. ; Adams, D. ; Laursen, T. ; Tu, K.-N. ; Morton, R. ; Lau, S. S.
Pub. info.:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.355-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A.. pp.311-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society