1.

Conference Proceedings

Conference Proceedings
Walker, D. D. ; Beaucamp, A. T. H. ; Doubrovski, V. ; Dunn, C. ; Freeman, R. ; McCavana, G. ; Morton, R. ; Riley, D. ; Simms, J. ; Wei, X.
Pub. info.: Optical manufacturing and testing VI : 31 July-1 August 2005, San Diego, California, USA.  pp.58690E-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5869
2.

Conference Proceedings

Conference Proceedings
Van Wingerden, J. ; Le Cam, L. ; Wientjes, R. ; Benndorf, M. ; Trouiller, Y. ; Belledent. J. ; Morton, R. ; Aksenov, Y.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560O-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
3.

Conference Proceedings

Conference Proceedings
Walker, D. D. ; Beaucamp, H. T. A. ; Duobrovski, V. ; Dunn, C. ; Evans, R. ; Freeman, R. ; McCavana, G. ; Morton, R. ; Riley, D. ; Simms, J. ; Yu, G. ; Wei, X.
Pub. info.: Current developments in lens design and optical engineering VII : 14-15 August 2006, San Diego, California, USA.  pp.62880P-,  2006.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6288
4.

Conference Proceedings

Conference Proceedings
Warrick, S. ; Hinnen, P. ; Morton, R. ; Cooper, K. ; Sassoulas, P.-O. ; Depre, J. ; Navarro, R. ; van Haren, R. ; Browning, C. ; Reber, D. ; Megens, H.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.154-163,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
5.

Conference Proceedings

Conference Proceedings
Walker, D.D. ; Beaucamp, A.T.H. ; Bingham, R.G. ; Brooks, D. ; Freeman, R. ; Kim, S.-W. ; King, A. ; McCavana, G. ; Morton, R. ; Riley, D. ; Simms, J.
Pub. info.: Optical manufacturing and testing V : 3-5 August 2003, San Diego, California, USA.  pp.15-28,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5180
6.

Conference Proceedings

Conference Proceedings
Walker, D. D. ; Beaucamp, A. T. H. ; Doubrovski, V. ; Dunn, C. ; Freeman, R. ; Hobbs, G. ; McCavana, G. ; Morton, R. ; Riley, D. ; Simms, J. ; Wei, X.
Pub. info.: Optical fabrication, testing and metrology II : 13-15 September 2005, Jena, Germany.  pp.59650S-,  2005.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5965
7.

Conference Proceedings

Conference Proceedings
Wong, S. P. ; Peng, Qicai ; Cheung, W. Y. ; Guo, W. S. ; Xu, J. B. ; Wilson, I. H. ; Hark, S. K. ; Morton, R. ; Lau, S. S.
Pub. info.: Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.307-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 438
8.

Conference Proceedings

Conference Proceedings
Adams, Daniel ; Alford, T. L. ; Laursen, T. ; Deng, F. ; Morton, R. ; Lau, S. S.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.337-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
9.

Conference Proceedings

Conference Proceedings
Zou, Y. L. ; Alford, T. L. ; Adams, D. ; Laursen, T. ; Tu, K.-N. ; Morton, R. ; Lau, S. S.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.355-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
10.

Conference Proceedings

Conference Proceedings
Haynes, T. E. ; Morton, R. ; Lau, S. S.
Pub. info.: III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A..  pp.311-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 300