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13 results

Conference Proceedings

1. The Removal Efficiency of Copper Impurity on Various Silicon Surfaces

Sekine, K. ; Choi, G.-M. ; Morita, H. ; Ohmi, T.

Pub. info.:	ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.211-220, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-3

Conference Proceedings

2. PERFORMANCE IMPROVEMENTS OF MOLTEN CARBONATE FUEL CELLS AND STACKS APPLYING Li/Na ELECTROLYTE

Watanabe, T. ; Toshiba, F. ; Morita, H. ; Yoshikawa, M. ; Mugikisra, V.

Pub. info.:	Carbonate fuel cell technology : proceedings of the fifth international symposium. pp.178-188, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-20

Conference Proceedings

3. The Dependence of Cu Removal Efficiency on the Initial Cu Concentration of Si Surface

Kim, J.-S. ; Morita, H. ; Joo, J.-D. ; Ohmi, T.

Pub. info.:	ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.199-210, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-3

Conference Proceedings

4. PASSIVATION OF Cu PARTICLES ON Si SUBSTRATE BY FOM(HF+O3- UPW) SOLUTION

Morita, H. ; Joo, J.-D. ; Messoussi, R. ; Kawada, K. ; Kim, J.-S. ; Ohmi, T.

Pub. info.:	Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.143-150, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-35

Conference Proceedings

5. THE EFFECT OF SURFACE DAMAGE DUE TO Si INPLANTATION ON ADSORPTION AND DESORPTION OF Cu ON Si SURFACE -

Kim, J.-S. ; Morita, H. ; Joo, J.-D. ; Ohmi, T.

Pub. info.:	Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.151-158, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-35

Conference Proceedings

6. PARTICLE AND METALLIC IMPURITIES REMOVAL BY USING NEW SPIN CLEANER BASED ON UCT CLEANING CONCEPT

Kwada, K. ; Nakamori, M. ; Morita, H. ; Okano, S. ; Nitta, T. ; Ohmi, T.

Pub. info.:	Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.528-535, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-35

Conference Proceedings

7. Functional components in SOI photonic crystal slabs (Invited Paper)

Shinya, A. ; Notomi, M. ; Kuramochi, E. ; Shoji, T. ; Watanabe, T. ; Tsuchizawa, T. ; Yamada, K. ; Morita, H.

Pub. info.:	Photonic Crystal Materials and Devices. pp.104-117, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5000

Conference Proceedings

8. Expression of MCFC's Cathode Reaction Resistance Based on Reaction Mechanism

Morita, H. ; Mugikura, Y. ; Izaki, Y. ; Watanabe, T. ; Abe, T.

Pub. info.:	Proceedings of the Fourth International Symposium on Carbonate Fuel Cell Technology. pp.151-166, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-4

Conference Proceedings

9. COMPARISON OF CLEANING EFFICIENCIES OF NOBEL METALS ON Si SURFACES BETWEEN O3-UPW AND SPM

Joo, J.-D. ; Kim, J.-S. ; Morita, H. ; Ohmi, T.

Pub. info.:	Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.280-288, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-35

10.

Conference Proceedings

10. Effect of Pore Structure on the Adsorption of Coagulation Factor VIII on Aminohexyl- and DEAE-Glucomannan Gel

Wakita, M. ; Morita, H. ; Yamaguchi, M.

Pub. info.:	Fundamentals of adsorption : proceedings of the Fourth International Conference on Fundamentals of Adsorption, Kyoto, May 17-22, 1992. pp.721-, 1993. Tokyo. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	80

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