1.

Conference Proceedings

Conference Proceedings
Ichiki,M. ; Zhang,L. ; Wang,Z. ; Morikawa,Y. ; Tanaka,M. ; Maeda,R.
Pub. info.: Complex mediums II : beyond linear isotropic dielectrics, 30 July-1 August, 2001, San Diego, USA.  pp.387-394,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4467
2.

Conference Proceedings

Conference Proceedings
Morikawa,Y. ; Ogawa,T. ; Tsuchiya,K. ; Noguchi,S. ; Nakashima,K.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.404-414,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
3.

Conference Proceedings

Conference Proceedings
Toyama,N. ; Miyashita,H. ; Morikawa,Y. ; Fujita,H. ; Iwase,K. ; Mohri,H. ; Hayashi,N. ; Sano,H.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.350-358,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
4.

Conference Proceedings

Conference Proceedings
Murai,S.M. ; Koizumi,Y. ; Kamibayashi,T. ; Saitou,H. ; Hoga,M. ; Morikawa,Y. ; Miyashita,H.
Pub. info.: 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.60-72,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4349
5.

Conference Proceedings

Conference Proceedings
Saitou,H. ; Koizumi,Y. ; Sanki,S. ; Kamibayashi,T. ; Murai,S.M. ; Miyashita,H. ; Fujita,H. ; Morikawa,Y. ; Nara,M. ; Hayashi,N. ; Hoga,M.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.1087-1095,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
6.

Conference Proceedings

Conference Proceedings
Morikawa,Y. ; Kokubo,H. ; Nishiguchi,M. ; Nara,M. ; Totsu,Y. ; Hoga,M. ; Hayashi,N.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.1126-1134,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
7.

Conference Proceedings

Conference Proceedings
Hiruta,K. ; Kubo,S. ; Morimoto,H. ; Yasaka,A. ; Hagiwara,R. ; Adachi,T. ; Morikawa,Y. ; Iwase,K. ; Hayashi,N.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.523-530,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
8.

Conference Proceedings

Conference Proceedings
Murai,S.M. ; Koizumi,Y. ; Kamibayashi,T. ; Saitou,H. ; Hoga,M. ; Morikawa,Y. ; Miyashita,H.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.890-901,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
9.

Conference Proceedings

Conference Proceedings
Kubo,S. ; Hiruta,K. ; Morimoto,H. ; Yasaka,A. ; Hagiwara,R. ; Adachi,T. ; Morikawa,Y. ; Iwase,K. ; Hayashi,N.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.158-164,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
10.

Conference Proceedings

Conference Proceedings
Morikawa,Y. ; Kokubo,H. ; Nara,M. ; Miyashita,H. ; Hayashi,N.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.132-146,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409