1.

Conference Proceedings
Conference Proceedings
1. Improving stigmation control of the CD-SEM
Choo,B. ; Punjabi,S. ; Morales,C. ; Singh,B. ; Templeton,M.K. ; Davidson,M.P.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.57-64,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
2.

Conference Proceedings
Conference Proceedings
2. Process control and optimization of conventional metal process for 0.18-ｦﾌm logic technology
Subramanian,R. ; Brown,S.E. ; Chen,S.H. ; Morales,C. ; Gallardo,E. ; Singh,B.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.178-186,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998