1.

Conference Proceedings
Conference Proceedings
1. New shrinkage technology for nano-contact hole formation
Oh, S. K. ; Kim, J. Y. ; Jung, Y. H. ; Lee, J. W. ; Kim, D. B. ; Kim, J. ; Lee, G. S. ; Lee, S. K. ; Ban, K. D. ; Jung, J. C. ; Bok, C. K. ; Moon, S. C.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.181-186,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
2.

Conference Proceedings
Conference Proceedings
2. Cycloolefin copolymer containing hindered hydroxyl group for 1 93nm photoresist
Kim, S.-K. ; An, I. ; Oh, H.-K. ; Lee, S. M. ; Bok, C. K. ; Moon, S. C.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.592-602,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
3.

Conference Proceedings
Conference Proceedings
3. Nanomolecular resists with adamantane core for 193-nm lithography
Kim, S.-K. ; An, I. ; Oh, H.-K. ; Lee, S. M. ; Bok, C. K. ; Moon, S. C.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.603-610,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
4.

Conference Proceedings
Conference Proceedings
4. Synthesis and Chemical Properties of Dye-Doped Mesoporous Transition Metal Oxides
Honma, I. ; Zhou, H. S. ; Moon, S. C.
Pub. info.: Advanced catalytic materials 1998 : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.131-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 549
5.

Conference Proceedings
Conference Proceedings
5. Preparation of Ti/B Binary Oxides by Sol-Gel Method and Their Photocatalytic Activity for Stoichiometric H2O Decomposition
Moon, S. C. ; Tabata, S. ; Okada, K. ; Fujiki, M. ; Mametsuka, H.
Pub. info.: Advanced catalytic materials 1996 : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.85-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 454
6.

Conference Proceedings
Conference Proceedings
6. Application of scatterometry to measure organic material profile [6152-110]
Koo, S. ; Ban, K. ; Lim. C. ; Bok, C. ; Moon, S. C. ; Kim. J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61522T-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
7.

Conference Proceedings
Conference Proceedings
7. Heterogeneous diffusion model for simulation of resist process [6154-104]
Lim, C. M. ; Park, J. T. ; Kim, S. M. ; Kim, H. S. ; Moon, S. C.
Pub. info.: Optical Microlithography XIX.  pp.61542S-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
8.

Conference Proceedings
Conference Proceedings
8. Improvement of alignment and overlay accuracy on amorphous carbon layers [6152-73]
Hwang, Y. S. ; Kang, E. ; Lee, K. ; Ban, K. D ; Bok, C. K. ; Lim, C. M. ; Kim, H. S ; Moon, S. C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615222-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152