1.
|
Conference Proceedings
|
Han, H. -S. ; Moon, S. -G. ; Yoon, J. -B. ; Kim, B. -G. ; Moon, S. -Y. ; Choi, S. -W. ; Han, W. -S.
Pub. info.: |
24th Annual BACUS Symposium on Photomask Technology. pp.213-219, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5567 |
|
2.
|
Conference Proceedings
|
Jang, I. -Y. ; Park, Y. -J. ; Kwon, H. -J. ; Moon, S. -Y. ; Choi, S. -W. ; Han, W. S.
Pub. info.: |
25th Annual BACUS Symposium on Photomask Technology. pp.59920O-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5992 |
|
3.
|
Conference Proceedings
|
Nam, D. ; Lee, D. -G. ; Kim, B. ; Moon, S. -Y. ; Choi, S. -W. ; Han, W. -S.
Pub. info.: |
25th Annual BACUS Symposium on Photomask Technology. pp.59922W-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5992 |
|