1.

Conference Proceedings
Conference Proceedings
1. Quantitative analysis of develop loading effect and its application
Han, H. -S. ; Moon, S. -G. ; Yoon, J. -B. ; Kim, B. -G. ; Moon, S. -Y. ; Choi, S. -W. ; Han, W. -S.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.213-219,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567
2.

Conference Proceedings
Conference Proceedings
2. A study of Cr to Mosi in situ dry etching process to reduce plasma induced defect [5992-25]
Jang, I. -Y. ; Park, Y. -J. ; Kwon, H. -J. ; Moon, S. -Y. ; Choi, S. -W. ; Han, W. S.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59920O-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
3.

Conference Proceedings
Conference Proceedings
3. How large MEEF is acceptable for the low-k1 lithography- [5992-97]
Nam, D. ; Lee, D. -G. ; Kim, B. ; Moon, S. -Y. ; Choi, S. -W. ; Han, W. -S.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59922W-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992