1.

Conference Proceedings
Conference Proceedings
1. Aid HfSiO High-k Dielectric and CVD-TaN Metal Gate
Chung, U. I. ; Park, S. G. ; Cho, H. -J. ; Lee, H. L. ; Park, H. B. ; Jeon, T. S. ; Jin, B. J. ; Kang, S. B. ; Shin, Y. G. ; Moon, J. T.
Pub. info.: Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium.  pp.362-368,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-04
2.

Conference Proceedings
Conference Proceedings
2. Statistical analysis of CD-SEM measurement and process control in the indistinguishable multi-process patterns [6152-100]
Yang, D. S. ; Jung, M. H. ; Lee, Y. M. ; Koh, C. W. ; Yeo, G. S. ; Woo, S. G. ; Cho, H. K. ; Moon, J. T.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61522K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
3.

Conference Proceedings
Conference Proceedings
3. Defect inspection of EUVmask blank using confocal microscopy: simulation and experiment [6151-49]
Kim, S. S. ; Park, J. ; Chalykh, R. ; Kang, J. ; Lee, S. ; Woo, S. G. ; Cho, H. K. ; Moon, J. T.
Pub. info.: Emerging Lithographic Technologies X.  pp.61511C-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151
4.

Conference Proceedings
Conference Proceedings
4. Investigation on polarization monitoring mask: pattern design and experimental verification [6152-60]
Hwang, C. ; Park, D. W. ; Shin, J. H. ; Nam, D. S. ; Lee, S. J ; Woo, S. G. ; Cho, H. K. ; Moon, J. T.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61521M-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152